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四(乙基甲基胺基)铪(IV),Tetrakis(ethylmethylamido)hafnium(IV) [TEMAH];packaged for use in deposition systems

包装用于沉积系统;别名:四(乙基甲基氨基)铪(IV);TEMAH;Tetrakis(ethylmethylamino)hafnium(IV)

线性分子式: [(CH3)(C2H5)N]4Hf CAS号: 352535-01-4 分子量: 410.90 MDL编号: MFCD03427130 PubChem化学物质编号: 329764168 NACRES: NA.23
制造商品牌: Sigma-Aldrich
货号(SKU): 725544
CAS号: 352535-01-4
MDL号: MFCD03427130
技术支持 √ 增值税发票 √ 免费送货 √ 质量保障 √
¥11,252.75

说明

一般描述

Tetrakis(ethylmethylamido)hafnium(IV) (TEMAH) is a colorlessliquid, which freezes at -50 °C and boils around 78 °C at 0.1 Torr. It is air-and water-sensitive.
 

应用

TEMAH is used as a precursor for atomic layer deposition(ALD) of conformal thin films of hafnium oxide (HfO2) and hafnium zirconium oxide (Hf1-xZrxO2), [1] which are used as dielectric films in semiconductor fabrication because of their high dielectric constants.

TEMAH is well-suited for ALD because its adsorption is self-limiting on a number of substrates including glass, indium-tin oxide(ITO), Si(100), and two-dimensional materials like MoS2.[2][3] TEMAH also conveniently reacts with either water or ozone as the oxygen-source in the ALD process.
 

特点和优势

This TEMAH is packaged in a Swagelok stainless-steeldeposition system convenient for connecting to ALD systems.
  • Steel cylinder connected to 316 stainless steelball-valve
  • 1/4 inch male Swagelok VCR connections

 

属性

质量水平

形式

liquid

reaction suitability

core: hafnium
reagent type: catalyst

bp

78 °C/0.01 mmHg (lit.)

mp

<-50 °C

密度

1.324 g/mL at 25 °C (lit.)

储存温度

2-8°C

SMILES string

CCN(C)[Hf](N(C)CC)(N(C)CC)N(C)CC

InChI

1S/4C3H8N.Hf/c4*1-3-4-2;/h4*3H2,1-2H3;/q4*-1;+4

InChI key

NPEOKFBCHNGLJD-UHFFFAOYSA-N

 

安全信息

警示用语:

Danger

危险分类

Acute Tox. 4 Oral - Eye Dam. 1 - Flam. Liq. 2 - Skin Corr. 1B - STOT SE 3 - Water-react 1

靶器官

Respiratory system

补充剂危害

储存分类代码

4.3 - Hazardous materials, which set free flammable gases upon contact with water

WGK

WGK 3

闪点(F)

51.8 °F - closed cup

闪点(C)

11 °C - closed cup

个人防护装备

Eyeshields, Faceshields, Gloves, type ABEK (EN14387) respirator filter

商品规格
属性名称属性值
储存温度 Storage temp.2-8°C冷藏
全球实时库存 Availability √美国St. Louis ≥ 33 | 欧洲Eur. ≥ 27 | 東京Tokyo ≥ 9 | 香港与北京 ≥ 16
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