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氮化钽蚀刻剂,Tantalum nitride etchant

别名:氮化钽腐蚀剂;Tantalum nitride etch; MDL编号: MFCD08705363 NACRES: NA.23
制造商品牌: 西格玛 Sigma-Aldrich
货号(SKU): 667501
MDL号: MFCD08705363
增值税发票 √ 免费送货 √ 订货电话:010-68689484
¥1,352.41

说明

氮化钽蚀刻剂是一种高纯度蚀刻剂系统,用于精确、清洁地蚀刻电子应用中的钽、氮化钽和氧化钽薄膜和抗蚀剂。

一般描述

Tantalum nitride etchant is a high purity etchant systems for precise, clean etching of tantalum, tantalum nitride, and tantalum oxide thin films and resists in electronics applications.
 

应用

在电子应用中可作为精确清洁地蚀刻钽、氮化钽和氧化钽薄膜和防蚀涂层的蚀刻溶液。
 

特点和优势

25°C 时腐蚀速度为 70-80Å/秒。与金正性或负性光致抗蚀剂共同使用。用去离子水冲洗。
 

制备说明

  • Etch times vary depending on material type (Ta, TaN, or Ta2O5) and purity.
  • Dilute with water or lower the temperature to achieve a lower etch rate. Adding 1 part water to 2 parts etchant or reducing the temperature 10 °C will approximately reduce the etch rate by 50%.
  • Parts to be etched should be placed in etchant solution with mild to moderate mechanical agitation.
  • Tantalum Etchants contain hydrofluoric acid and will attack silicon oxides, titanium, nickel, aluminum, and chromium.
  • Gold would be the ideal etch stop. You might also succeed with tungsten
  • Rinse with Deionized water.

 

属性

质量水平

100

 

安全信息

象形图

CorrosionSkull and crossbones

警示用语:

Danger

危险分类

Acute Tox. 1 Dermal - Acute Tox. 2 Oral - Acute Tox. 3 Inhalation - Eye Dam. 1 - Met. Corr. 1 - Skin Corr. 1A

补充剂危害

储存分类代码

6.1B - Non-combustible, acute toxic Cat. 1 and 2 / very toxic hazardous materials

WGK

WGK 2

个人防护装备

Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter

商品规格
属性名称属性值
储存温度 Storage temp.常温阴凉避光
全球实时库存 Availability √美国St. Louis ≥ 33 | 欧洲Eur. ≥ 27 | 東京Tokyo ≥ 9 | 香港与北京 ≥ 16